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Chemical Data Sheet
Common name: PFC-116
Chemical name: Hexafluoroethane
Other names: R-116, FC-116, Perfluoroethane
Formula: C2F6
HS code:
CAS number: 76-16-4
UN number:
Substance controlled under: Kyoto Protocol
Montreal Protocol control schedule for this substance: Not applicable
Applications: Semiconductor manufacturing
ODP:  
GWP:  9 200
Atmospheric lifetime (years):  

Trade names of chemical products containing this substance:
(including pure substances and blends)
  Klea 508 - INEOS Fluor
PFC-116 - Daikin Industries Ltd.
Suva 95 - DuPont Fluoroproducts

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