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Chemical Data Sheet
Common name: PFC-14
Chemical name: Tetrafluoromethane
Other names: R-14, Perfluoromethane
Formula: CF4
HS code:
CAS number: 75-73-0
UN number:
Substance controlled under: Kyoto Protocol
Montreal Protocol control schedule for this substance: Not applicable
Applications: Semiconductor manufacturing
ODP:  
GWP:  6 500
Atmospheric lifetime (years):  

Trade names of chemical products containing this substance:
(including pure substances and blends)
  Khladon Fluorocarbon R14 Tetrafluoromethane (technical quality) - JSC "Halogen" Russia
PFC-14 - Daikin Industries Ltd.

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